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High-performance cryogenic vacuum pump designed for semiconductor manufacturing and scientific research applications.
This advanced cryogenic vacuum pump system delivers exceptional performance for high-precision applications. Designed with cutting-edge technology, it provides reliable vacuum solutions for semiconductor manufacturing, scientific research, and industrial processes.
| Parameter | Value |
|---|---|
| Pumping Speed | 2,000 L/s |
| Ultimate Pressure | < 1×10⁻⁸ mbar |
| Cooling Method | Closed-cycle helium |
| Operating Temperature | 4K - 20K |
| Power Consumption | 3.5 kW |
Our engineering team provides comprehensive support including installation, commissioning, and ongoing maintenance services to ensure optimal performance throughout the product lifecycle.